마스크얼라이너

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작성자쏘마 조회 40회 작성일 2021-02-11 01:10:30 댓글 0

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Mask Aligner demonstration



Karl Suss MA6 Mask Aligner - Standard Operating Procedures

View the SOP documentation
http://www.inrf.uci.edu/sop-ksma6/

The Karl Suss Mask Aligner performs high resolution photolithography. It offers unsurpassed flexibility in the handling of irregularly shaped substrates of differing thickness, as well as standard size wafers up to 6'' in diameter. It uses 5" masks System and it can be operated manually. All contact exposure programs (vacuum, hard, soft contact and proximity) are provided to print structures far into the submicron region.

Visit the Karl Suss MA6 Mask Aligner page
http://www.inrf.uci.edu/facility/equipment/lithography/karl-suss-ma6-mask-aligner/

8" manual Mask Aligner



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